Scanning Electron Microscopes

JEOL 6320FXV Field Emission Scanning Electron Microscope

High resolution field emission cold cathode scanning electron microscope with semi-in-lens detector configuration achieving resolution down to 2 nm. It is equipped with BE (backscattered) detector and thin window energy dispersive X-ray spectrometer (EDS) from Princeton Gamma-Tech for compositional analysis, imaging and mapping. Fully digital image acquisition.